A slot antenna consists of a metal surface, usually a flat plate, with one or more holes or slots cut out. When the plate is driven as an antenna by a driving frequency, the slot radiates electromagnetic waves in a way similar to a dipole antenna. The shape and size of the slot, as well as the driving frequency, determine the radiation pattern. RLSA - Radial Line Slot Antenna - Abbreviations.com Radial Line Slot Antenna. Academic & Science » Electronics. Add to My List Edit this Entry Rate it: (5.00 / 4 votes) Translation Find a translation for Radial Line ... Research - 東京工業大学 Our research themes are planar slotted waveguide antennas and electromagnetic theory. Radial Line Slot Antenna (RLSA) DBS * Reception ... Plasma Etching.
A Reconfigurable Radial Line Slot Array Antenna for... |…
Formation, nature, and stability of the arsenic-silicon ... plasma doping. Concentration depth profiles associated with arsenic plasma doping using a radial line slot antenna plasma source22 are includedinFig.1 [Secondary Ion Mass Spectrometry (SIMS)] a)Authors to whom correspondence should be addressed. Electronic addresses: peter.ventzek@us.tel.com and gshwang@che.utexas.edu WO2010140526A1 - Plasma processing apparatus and power ... For example, Patent Document 1, RLSA (Radial Line Slot Antenna) system is disclosed, which is one of a microwave plasma processing apparatus. In RLSA device, disc-shaped dielectric window is provided in the ceiling surface of the processing chamber.
An eight-ring radial helical array antenna based on a novel slot-coupled structure is designed and simulated. The novel coupling structure has the advantages of high power-handling capacity and excellent coupling ability.
RLSA - Radial Line Slot Antenna - Abbreviations.com Radial Line Slot Antenna. Academic & Science » Electronics. Add to My List Edit this Entry Rate it: (5.00 / 4 votes) Translation Find a translation for Radial Line ... Research - 東京工業大学 Our research themes are planar slotted waveguide antennas and electromagnetic theory. Radial Line Slot Antenna (RLSA) DBS * Reception ... Plasma Etching. A Model for Antenna-Plasma Wave Co upling towards Control of ... A Model for Antenna-Plasma Wave Co upling towards Control of Uniformity in Slot-Excited Microwave Discharges Daichi SAWADA, Akihiro TSUJI, Takanori KITSUDO, Yasuyoshi YASAKA, and Hiromasa TAKENO Department of Electrical and Electronic Engineering, Kobe University, 1-1 Rokkodai, Nada, Kobe 657-8501, Japan Near-Field Distribution of Radial Line Slot Antenna for ...
Plasma and Ion Sources in Large Area Coatings: A Review André Anders Lawrence Berkeley National Laboratory, University of California, Berkeley, California 94720 Abstract Efficient deposition of high-quality coatings often requires controlled application of excited or ionized particles. These particles are either condensing (film-forming) or
radial line slot antenna for this application. Previous studies were presented in [2]. In that paper, the idea of the monopulse antenna was implemented at Ku band. However, there was not an optimization process of the slot (position and length). This paper shows the optimization process for the slot arrangement Design Method, Analysis and Prototypes of Radial Line Slot ... II. Radial Line Slot Antenna Structure Figure 1 shows the structure of the antenna. A Radial Line Slot Antenna is formed by a parallel plate structure, whose height is less than half a wavelength to avoid the propagation of upper modes. A radial TEM mode is generated through a coaxial probe (or several probes). Radial Microstrip Slotline Feed Network for Circular Mobile ...
The feature of the microwave plasma generated by the radial line slot antenna is that the plasma of energy having a relatively high electron temperatureAs described above, the plasma processing apparatus using the antenna having any one of the slot plates and the dielectric windows described...
Impact of static magnetic fields on the radial line slot ... The radial line slot antenna plasma source is used in semiconductor device fabrication. As is the case for all plasma sources, ever more strict uniformity control requirements are driven by the precision demands of new device technologies. Large volume diffusion plasmas, of which the radial line slot antenna source is one type, must overcome transport effects or diffusion modes that tend to ... Simulations of the Plasma Structure of a Radial Line ... The Radial Line Slot Antenna (RLSA) plasma source couples microwave power through a slot antenna structure and window to a plasma characterized by a generation zone adjacent to the window and a diffusion zone that contacts a substrate. The diffusion zone is characterized by a very low electron temperature. Radial line slot antenna having a conductive layer - Tokyo ... The plasma source 130 comprises a surface wave plasma (SWP) source, such as a radial line slot antenna (RLSA), to be discussed below. As seen in FIG. 1A, the plasma processing system 100 comprises a gas supply system 135 coupled to the processing chamber 110 and configured to introduce a process gas to process space 115. During dry plasma ...
In the present paper, a historical review isfrequency antenna is based on the physical picture of such